Pe, P., ko., Aceves, M., de La Hidalga, F., Díaz, T., ., & Torres, A. (1993). Influence of process sequence on the P ion implatation gettering efficiency. Revista Mexicana De Física, 40(5), 790–797. Retrieved from https://rmf.smf.mx/ojs/index.php/rmf/article/view/2441