García-Méndez, M., Morales-Rodríguez, S., Machorro, R., & De La Cruz, W. (2008). Characterization of ALN thin films deposited by DC reactive magnetron sputtering. Revista Mexicana De Física, 54(4), 271–0. Retrieved from https://rmf.smf.mx/ojs/index.php/rmf/article/view/3619