Pe, P., kov., Aceves, M., . and Calleja, W. (1991) “Phosphorus ion implantation gettering effects in MOS structures”, Revista Mexicana de Física, 38(5), pp. 836–845. Available at: https://rmf.smf.mx/ojs/index.php/rmf/article/view/2281 (Accessed: 5 July 2024).