Pe, P., kov., T. Díaz, M. Aceves M., M. Linares A., ., and W. Calleja A. “Influence of Low Temperature Chlorinated Oxides on the Stability and Generation-Recombination Properties of MOS Structures”. Revista Mexicana De Física, vol. 35, no. 1, Jan. 1988, pp. 75-82, https://rmf.smf.mx/ojs/index.php/rmf/article/view/2033.