S, F., oval-Ibarra., E. Gutiérrez-Domínguez, ., and I. Fuentes-Tápia. “Silicon Supports for Condenser Microphone Applications”. Revista Mexicana De Física, vol. 46, no. 1, Jan. 2000, pp. 72-77, https://rmf.smf.mx/ojs/index.php/rmf/article/view/2930.