Tiznado, H., D. Domínguez, W. de la Cruz, R. Machorro, M. Curiel, and G. Soto. “TiO$_{2}$ and Al$_{2}$O$_{3}$ Ultra Thin Nanolaminates Growth by ALD; Instrument Automation and Films Characterization”. Revista Mexicana De Física, vol. 58, no. 6, Jan. 2012, pp. 459-65, https://rmf.smf.mx/ojs/index.php/rmf/article/view/3949.