Flatness measurement using a grazing incidence interferometer

N. Alcalá Ochoa, G. Mendiola, J.E.A. L, grave.

Abstract


The purpose of this work is to report results of flatness measurements using a grazing incidence interferometer. We show that this interferometer provides enough accuracy to measure nominally flat polishing tools and rough surfaces. In order to calculate the deformation of the surface under test, an interferogram is analyzed with digital imaging techniques based on Fourier methods. We found experimentally that the entire surface topography can be recovered with errors lower than $\sim 0.6 \mu $m, or $\sim \lambda_{eqv} / 6$, where $\lambda _{eqv} = 3.6441 \mu$m is the equivalent wavelength of the interferometer.

Keywords


Optical testing; interferometry; fringe analysis; laser applications

Full Text:

PDF

Refbacks

  • There are currently no refbacks.


Revista Mexicana de Física

ISSN: 2683-2224 (on line), 0035-001X (print)

Bimonthly publication of Sociedad Mexicana de Física, A.C.
Departamento de Física, 2o. Piso, Facultad de Ciencias, UNAM.
Circuito Exterior s/n, Ciudad Universitaria. C. P. 04510 Ciudad de México.
Apartado Postal 70-348, Coyoacán, 04511 Ciudad de México.
Tel/Fax: (52) 55-5622-4946, (52) 55-5622-4840. rmf@ciencias.unam.mx