Structural changes in ZrO$_{x}$N$_{y}$/ZrO$_{2}$ coatings deposited through spray pyrolisis-nitriding

G. I, J. J, a. , M. Bethencourt, G. Cifredo, G. Blanco


Thin films of zirconium oxynitride were deposited on stainless steel 316L and characterized through ultrasonic spray pyrolysis-nitriding (UPS-N). Initially, thin films of ZrO$_{2}$ are deposited using ultrasonic spray pyrolysis, and later ZrO$_{2 }$ films were nitrided in a NH$_{3}$ atmosphere. We analyzed the effect of some variables, such as substrate temperature, flow ratio, and time of the production of coatings and their influence on the structure of the films. The characterization was carried out using X-ray diffraction (XRD) spectroscopy, X-ray photoelectron (XPS), and scanning electron microscopy (SEM). Films that were grown using the UPS method exhibited a tetragonal zirconia polycrystalline structure with preferential orientation in plane (101). These films, after being nitrided in an atmosphere of anhydrous ammonia at 1023 K, go through two processes: a phase transition from tetragonal to monoclinic, and later the formation of zirconium oxynitride rhombohedral ZrO$_{x}$N$_{y}$.


Zirconium oxinitride; spray pyrolysis; coatings

Full Text:



  • There are currently no refbacks.

REVISTA MEXICANA DE FÍSICA, year 67, issue 2, March-April 2021. Bimonthly Journal published by Sociedad Mexicana de Física, A. C. Departamento de Física, 2º Piso, Facultad de Ciencias, Universidad Nacional Autónoma de México, Ciudad Universitaria, Alcaldía Coyacán, C.P. 04510 , Ciudad de México. Apartado Postal 70-348. Tel. (+52)55-5622-4946,, e-mail: Chief Editor: José Alejandro Ayala Mercado. INDAUTOR Certificate of Reserve: 04-2019-080216404400-203, ISSN: 2683-2224 (on line), 0035-001X (print), both granted by Instituto Nacional del Derecho de Autor. Responsible for the last update of this issue, Technical Staff of Sociedad Mexicana de Física, A. C., Fís. Efraín Garrido Román, 2º. Piso, Facultad de Ciencias, Universidad Nacional Autónoma de México, Ciudad Universitaria, Alcaldía Coyacán, C.P. 04510 , Ciudad de México. Date of last modification, March 1st., 2021.

The responsibility of the materials published in Revista Mexicana de Física rests solely with their authors and their content does not necessarily reflect the criteria of the Editorial Committee or the Sociedad Mexicana de Física. The total or partial reproduction of the texts hereby published is authorized as long as the complete source and the electronic address of the publications are cited.

There is no fee for article processing, submission or publication.

Revista Mexicana de Física by Sociedad Mexicana de Física, A. C. is distributed under a Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License