Solution-processed transparent dielectric based on spin-on glass for electronic devices

M.A. Dominguez, J.A. Luna-Lopez, M. Moreno, A. Orduña, M. Garcia, S. Alcantara, S. Soto

Abstract


In this work, the fabrication and characterization of MOS and MIM capacitors using a solution-processed dielectric based on spin-on glass (SOG) solution is presented. The SOG solution is diluted with deionized water (DI) in order to make easier the evaporation of the organic material presented in the SOG. The films are highly transparent in the visible range, which makes feasible they use in transparent electronics. The capacitance-voltage and current-voltage characteristics of the MOS and MIM capacitors demonstrate the application of the solution-processed SOG/DI film as dielectric for electronic devices.

Keywords


Solution-processed; dielectric; spin-on glass

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REVISTA MEXICANA DE FÍSICA, year 67, issue 1, January-February 2021. Bimonthly Journal published by Sociedad Mexicana de Física, A. C. Departamento de Física, 2º Piso, Facultad de Ciencias, Universidad Nacional Autónoma de México, Ciudad Universitaria, Alcaldía Coyacán, C.P. 04510 , Ciudad de México. Apartado Postal 70-348. Tel. (+52)55-5622-4946, https://rmf.smf.mx/ojs/rmf, e-mail: rmf@ciencias.unam.mx. Chief Editor: José Alejandro Ayala Mercado. INDAUTOR Certificate of Reserve: 04-2019-080216404400-203, ISSN: 2683-2224 (on line), 0035-001X (print), both granted by Instituto Nacional del Derecho de Autor. Responsible for the last update of this issue, Technical Staff of Sociedad Mexicana de Física, A. C., Fís. Efraín Garrido Román, 2º. Piso, Facultad de Ciencias, Universidad Nacional Autónoma de México, Ciudad Universitaria, Alcaldía Coyacán, C.P. 04510 , Ciudad de México. Date of last modification, January 4, 2021.

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