Synthesis of aluminum nitride nanostructures via chemical vapor deposition method with nickel as catalyst
DOI:
https://doi.org/10.31349/RevMexFis.64.67Keywords:
AlN, CVD, nanowire, catalyst.Abstract
The authors successfully synthesized aluminum nitride (AlN) nanowires by chemical vapor deposition (CVD) using aluminum (Al) powderand ammonia (NH3) as starting materials with nickel (Ni) as catalyst. The morphologies, the composition and structure information of
samples were characterized by scanning electron microscopies (SEM), transmission electron microscopies (TEM), X-ray diffraction (XRD)
and X-ray photoelectron spectroscopy (XPS). Nanostructures with manifold morphologies were obtained by tuning the growth temperature
and the growth time. The AlN nanowires are proved to have the wurtzite structure as demonstrated by XRD. The growth mechanism of AlN
nanowires assisted with Ni catalyst is proposed to explain the nucleation and growth of nanowires.
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