Confocal profiling of grooves and ridges with circular section using the divided aperture technique

Authors

  • J.F. Aguilar

Keywords:

Confocal microscopy, light scattering, optical profilometry

Abstract

The divided-pupil technique for the simulation of confocal imaging is applied to remove those artifacts appearing due to the symmetry of the object. A rigorous treatment is used to model the imaging system which is a two-dimensional confocal microscope, working in reflection mode. Since the geometry of the associated electromagnetic problem is 2-D, the objects analyzed are highly symmetric and cylindrical. The advantages and limitations of this technique are discussed and shown by means of examples.

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Published

2005-01-01

How to Cite

[1]
J. Aguilar, “Confocal profiling of grooves and ridges with circular section using the divided aperture technique”, Rev. Mex. Fís., vol. 51, no. 4, pp. 420–0, Jan. 2005.

Issue

Vol. 51 No. 4 (2005): Revista Mexicana de Física.

Section

Articles

License

Authors retain copyright and grant the Revista Mexicana de Física right of first publication with the work simultaneously licensed under a CC BY-NC-ND 4.0 that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.