Reconstrucción 3D de la sagita de una superficie en rotación

Abstract

An instrument of optical contact is described to obtain the values of zagita in 3D of concave and convex nonreflecting surfaces. The system measure the zagita imaging a thin variable slit over the surface test. To obtain 3D information the instrument is translated in $X$ direction and the surface test is rotated a constant angular velocity. With this system is reached a resolution of 2.5$\mu$m in $Z$ and 1$\mu$m in $X$.