Reconstrucción 3D de la sagita de una superficie en rotación
Keywords:
Metrology, profilometryAbstract
An instrument of optical contact is described to obtain the values of zagita in 3D of concave and convex nonreflecting surfaces. The system measure the zagita imaging a thin variable slit over the surface test. To obtain 3D information the instrument is translated in $X$ direction and the surface test is rotated a constant angular velocity. With this system is reached a resolution of 2.5$\mu$m in $Z$ and 1$\mu$m in $X$.Downloads
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