Transistores de película delgada basados en óxido de Zinc por spray pyrolysis ultrasónico de alta frecuencia a baja temperatura


  • Ovier Obregon Benemerita Universidad Autonoma de Puebla
  • Pedro Rosales INAOE
  • Jose Luna Benemerita Universidad Autonoma de Puebla
  • Miguel Angel Dominguez Jimenez Benemerita Universidad Autonoma de Puebla



Transistores de pelicula delgada, Oxido de Zinc, spray pyrolysis ultrasónico, Spin-on Glass


In this work, the fabrication of zinc oxide thin film transistors (ZnO TFTs) on plastic substrates by High-frequency Ultrasonic Spray Pyrolysis
at Low Temperature is presented. The maximum fabrication temperature was 200±C. Spin-on glass was used as gate insulator. Polyethylene
terephthalate is used as plastic substrate. The ZnO TFTs exhibit an electron mobility of 1.25 cm2/Vs and a threshold voltage of 10.5 V,
while the on/off current ratio was of 104. In addition, the trap density in active layer and at the insulator/semiconductor interface is extracted.
Moreover, Metal-Insulator-Metal capacitors were fabricated on plastic and characterized in order to evaluate the gate insulator


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