Synthesis and characterization of Cu2O thin films obtained from a CO2-N2 plasma mixture

Authors

  • M. C. González TecNM-Tecnológico de Estudios Superiores de Jocotitlán https://orcid.org/0000-0002-0933-6374
  • V. H. Castrejo-Sanchez TecNM-Tecnológico de Estudios Superiores de Jocotitlán
  • P. G. Reyes Universidad Autonoma del Estado de México
  • A. Gómez Universidad Autónoma del Estado de México
  • H. Martínez Universidad Nacional Autonoma de México
  • J. Vergara Escuela de Estudios Superiores de Xalostoc, Universidad Autonoma del Estado de Morelos
  • C. Torres Escuela de Estudios Superiores de Xalostoc, Universidad Autonoma del Estado de Morelos

DOI:

https://doi.org/10.31349/RevMexFis.71.061001

Keywords:

Plasma, Thinfilms, Cu2O, Raman, SEM, AFM, EDS, OES, XRD

Abstract

In this study, a CO2-N2 plasma mixture was used to synthesize Cu2O thin-films oxides metallics in a pulsed sputtering system. The plasma was generated using a percentage of 80% CO2-20% N2  between two copper (Cu) electrodes. The Cu2O obtained were characterized by Raman spectroscopy, with the intention of detecting the bonding structure of the deposited thin films, while scanning electron microscopy (SEM) and atomic force microscopy (AFM) were used to study the surface morphology of the thin film. Dispersion Analysis (EDS) was conducted to determine the stoichiometric equilibrium present in the sample. The plasma characterization was performed during the deposition process using optical emission spectroscopy (OES), and the influence of the deposition process parameters on the chemical fragmentation of species present in the plasma was determined. The Raman results confirm the presence of Cu2O films, and SEM analysis showed an irregular surface on the Cu substrate, forming a non-homogeneous surface. The morphology observed through AFM indicated that the thin films grew as islands, corroborating the generation of amorphous structures grown on the Cu surface. EDS analysis confirmed the presence of only copper and oxygen in the sample, whereas OES spectra confirmed the dissociation of CO2 within the plasma, allowing for the presence of oxides within it.

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Published

2025-11-01

How to Cite

[1]
M. C. Gonzalez, “Synthesis and characterization of Cu2O thin films obtained from a CO2-N2 plasma mixture”, Rev. Mex. Fís., vol. 71, no. 6 Nov-Dec, pp. 061001 1–, Nov. 2025.

Issue

Vol. 71 No. 6 Nov-Dec (2025): Revista Mexicana de Física

Section

10 Material Sciences

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Copyright (c) 2025 M. C. González, V. H. Castrejo-Sanchez, P. G. Reyes, A. Gómez, H. Martínez, J. Vergara, C. Torres

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