Cu 4O3 thin films deposited by non-reactive rf-magnetron sputtering from a copper oxide target

Authors

  • M. A. Cruz Almazán TESJo
  • E. Vigueras Santiago
  • R. López Tecnológico de Estudios Superiores de Jocotitlán http://orcid.org/0000-0001-8341-3684
  • S. Hernández López UAEMEX
  • V. Hugo Castrejón Sánchez TESJo
  • A. Esparza UNAM
  • C. Encarnación Gómez Universidad Juárez Autónoma de Tabasco

DOI:

https://doi.org/10.31349/RevMexFis.67.495

Keywords:

paramelaconite, Cu​4​O​3​, non reactive sputtering, thermal oxidation

Abstract

Copper oxide thin films deposited by sputtering are frequently formed by using metal copper targets in reactive atmospheres. In this report, paramelaconite (Cu4O3) thin films were deposited by non-reactive rf magnetron sputtering. The target used for sputtering was a copper oxide disk fabricated by oxidation of metal copper at 1000 °C for 24 h in air
atmosphere. X-ray diffraction (XRD) results showed that the copper oxide target was mainly composed of cupric oxide (CuO) and cuprous oxide (Cu2O) crystals. Raman analyses suggested that the surface of the copper oxide disk is composed by a (CuO) layer. XRD measurements performed to the copper oxide thin films deposited by non-reactive rf magnetron sputtering showed that the film is composed of (Cu4O3) crystals. However,
Raman measurements indicated that the Cu4O3 thin films are also composed by amorphous CuO and Cu2O.



Author Biographies

E. Vigueras Santiago

UAEMEX

R. López, Tecnológico de Estudios Superiores de Jocotitlán

Full Time Professor, División de Ingeniería Mecatrónica.

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Published

2021-05-01

How to Cite

[1]
M. A. Cruz Almazán, “Cu 4O3 thin films deposited by non-reactive rf-magnetron sputtering from a copper oxide target”, Rev. Mex. Fís., vol. 67, no. 3 May-Jun, pp. 495–499, May 2021.

Issue

Vol. 67 No. 3 May-Jun (2021): Revista Mexicana de Física

Section

10 Material Sciences

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Copyright (c) 2021 Miguel Ángel Cruz Almazán, Enrique Vigueras Santiago, Roberto López, Susana Hernández López, Victor Hugo Castrejón Sánchez, Alejandro Esparza, Cecilia Encarnación Gómez

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