Planar waveguides produced by implanting Si and C ions in rutile
DOI:
https://doi.org/10.31349/RevMexFis.64.251Keywords:
Optical Waveguides, Ion Implantation, Rutile, Important Optical properties of Crystals, Various Crystal Faces, Ions, Fluences, Two Dierent Ions-Damage, Reduce Fluence With Si Ions.Abstract
Planar waveguides were generated in samples of rutile crystal (TiO2) by bombarding with two typesof ion: silicon and carbon. Rutile is used because of its anisotropic properties, particularly its birefrin-
gence. The guide is generated due to damage caused by the ions in the crystal which change its index of
refraction. Three parameters were used: the implantation ion energy, the implantation
uence, and the
orientation of the crystallographic planes. The refractive index prole of the irradiated sample was cal-
culated and together with the value of the optical barrier the comparison was made between the dierent
waveguides generated.
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