Influence of low temperature chlorinated oxides on the stability and generation-recombination properties of MOS structures

Authors

  • P. Pe
  • kov.
  • T. Díaz
  • M. Aceves M.
  • M. Linares A.
  • .
  • W. Calleja A.

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Published

1988-01-01

How to Cite

[1]
P. Pe, “Influence of low temperature chlorinated oxides on the stability and generation-recombination properties of MOS structures”, Rev. Mex. Fís., vol. 35, no. 1, pp. 75–82, Jan. 1988.

Issue

Vol. 35 No. 1 (1988): Revista Mexicana de Física.

Section

Articles

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Authors retain copyright and grant the Revista Mexicana de Física right of first publication with the work simultaneously licensed under a CC BY-NC-ND 4.0 that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.