Study of the stress-related vacancy generation in silicon due to silicon nitride films

Authors

  • F. Flores Gracia
  • J. Carrillo López
  • .
  • M. Aceves Mijares

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Published

1999-01-01

How to Cite

[1]
F. Flores Gracia, J. Carrillo López, ., and M. Aceves Mijares, Study of the stress-related vacancy generation in silicon due to silicon nitride films, Rev. Mex. Fís. 45, (1999).

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