Estudio de la cinética de auto-intersticiales de silicio usando membranas de silicio bajo oxinitridación térmica

Authors

  • J. Carrillo-López
  • A. Morales-Acevedo

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Published

1999-01-01

How to Cite

[1]
J. Carrillo-López and A. Morales-Acevedo, “Estudio de la cinética de auto-intersticiales de silicio usando membranas de silicio bajo oxinitridación térmica”, Rev. Mex. Fís., vol. 45, no. 2, pp. 163–173, Jan. 1999.

Issue

Vol. 45 No. 2 (1999): Revista Mexicana de Física.

Section

Articles

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Authors retain copyright and grant the Revista Mexicana de Física right of first publication with the work simultaneously licensed under a CC BY-NC-ND 4.0 that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.