Structural properties of Pb(Mg$_{1 / 3}$Nb$_{2 / 3}$)$_{0.90}$Ti$_{0.10}$O$_{3}$ films deposited by pulsed laser ablation on titanium nitride substrates

Abstract

Pulsed laser ablation is used to deposit Pb(Mg$_{1 / 3}$Nb$_{2 / 3})_{0.90}$Ti$_{0.10}$O$_{3}$ (PMNT) polycrystalline thin films on TiN bottom electrodes, which in turn are prepared by DC sputtering on Si wafers. The PMNT perovskite phase formation is confirmed by x-ray diffraction analysis. The morphology of the films is analyzed by scanning electron microscopy. The nature of the ferroelectric layer-electrode interface is studied by transmission electron microscopy. The effect of the characteristics of the interface in the performance of the multilayer system is also studied. The characteristics of the TiN films, used as electrodes, are evaluated using Auger electron spectroscopy and x-ray photoelectron spectroscopy. Finally, a model for the PMNT/TiN/SiO$_{2}$/Si film system thus obtained is proposed.