Influence of low temperature chlorinated oxides on the stability and generation-recombination properties of MOS structures

Authors

  • P. Pe
  • kov.
  • T. Díaz
  • M. Aceves M.
  • M. Linares A.
  • .
  • W. Calleja A.

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Published

1988-01-01

How to Cite

[1]
P. Pe, kov., T. Díaz, M. Aceves M., M. Linares A., ., and W. Calleja A., Influence of low temperature chlorinated oxides on the stability and generation-recombination properties of MOS structures, Rev. Mex. Fís. 35, (1988).

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