Multipurpose microwave plasma source

Authors

  • Enrique Camps.
  • Oscar Olea.
  • Gerardo Anguiano.
  • Ricardo Ondarza.
  • .
  • César R. Gutiérrez

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Published

1992-01-01

How to Cite

[1]
Enrique Camps., Oscar Olea., Gerardo Anguiano., Ricardo Ondarza., ., and C. R. Gutiérrez, “Multipurpose microwave plasma source”, Rev. Mex. Fís., vol. 39, no. 2, pp. 260–270, Jan. 1992.