Investigation of process-induced contaminations in silicon wafer processing

Authors

  • P. Pe
  • kov.
  • M. Aceves
  • A. Torres
  • .
  • F.J. de la Hidalga

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Published

1992-01-01

How to Cite

[1]
P. Pe, kov., M. Aceves, A. Torres, ., and F. de la Hidalga, “Investigation of process-induced contaminations in silicon wafer processing”, Rev. Mex. Fís., vol. 39, no. 6, pp. 939–944, Jan. 1992.

Issue

Vol. 39 No. 6 (1992): Revista Mexicana de Física.

Section

Articles

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Authors retain copyright and grant the Revista Mexicana de Física right of first publication with the work simultaneously licensed under a CC BY-NC-ND 4.0 that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.