Study of the stress-related vacancy generation in silicon due to silicon nitride films

Authors

  • F. Flores Gracia
  • J. Carrillo López
  • .
  • M. Aceves Mijares

Downloads

Published

1999-01-01

How to Cite

[1]
F. Flores Gracia, J. Carrillo López, ., and M. Aceves Mijares, “Study of the stress-related vacancy generation in silicon due to silicon nitride films”, Rev. Mex. Fís., vol. 45, no. 2, pp. 156–162, Jan. 1999.

Issue

Vol. 45 No. 2 (1999): Revista Mexicana de Física.

Section

Articles

License

Authors retain copyright and grant the Revista Mexicana de Física right of first publication with the work simultaneously licensed under a CC BY-NC-ND 4.0 that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.