Influence of surface generation velocity and field-enhanced carrier generation on the measured generation lifetime and relaxation time constant in MOS structures
Keywords:
Field-enhanced carrier generation, surface generation velocity, MOS structuresAbstract
Today's high quality semiconductor materials are characterized with generation lifetimes in the range 10$^{ - 3 }$-- 10$^{ - 2}$ sec. This requires re-examination of the influence of some factors on the correct extraction of generation lifetime with the measurement techniques used. Surface generation velocity and field-enhanced carrier generation influence on the measured generation lifetime and relaxation time constant in MOS structures. In the present work, analysis of this influence is presented. It is shown how a simple interpretation of the experimental data can introduce a large error in the determination of these parameters. The influence of all factors must be taken into account.Downloads
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