Influence of process sequence on the P ion implatation gettering efficiency

Authors

  • P. Pe
  • ko.
  • M. Aceves
  • F.J. de La Hidalga
  • T. Díaz
  • .
  • A. Torres

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Published

1993-01-01

How to Cite

[1]
P. Pe, “Influence of process sequence on the P ion implatation gettering efficiency”, Rev. Mex. Fís., vol. 40, no. 5, pp. 790–797, Jan. 1993.

Issue

Vol. 40 No. 5 (1993): Revista Mexicana de Física.

Section

Articles

License

Authors retain copyright and grant the Revista Mexicana de Física right of first publication with the work simultaneously licensed under a CC BY-NC-ND 4.0 that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.