The effect of extrinsic contamination on ion implantation gettering

Authors

  • P. Pe
  • kov.
  • F.J. De La Hidalga
  • M. Aceves
  • .
  • M. Linares

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Published

1994-01-01

How to Cite

[1]
P. Pe, kov., F. De La Hidalga, M. Aceves, ., and M. Linares, “The effect of extrinsic contamination on ion implantation gettering”, Rev. Mex. Fís., vol. 41, no. 6, pp. 897–904, Jan. 1994.

Issue

Vol. 41 No. 6 (1994): Revista Mexicana de Física.

Section

Articles

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Authors retain copyright and grant the Revista Mexicana de Física right of first publication with the work simultaneously licensed under a CC BY-NC-ND 4.0 that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.