Diseño de una superficie cónica en silicio cristalino

Authors

  • A.G. Rojas H.
  • F. Renero C.
  • W. Calleja A.
  • R. Pérez R.
  • O. Totolhua P.
  • F. Gracia T.

Keywords:

Optoelectronic devices, micromachining in microelectronics, optical mirrors

Abstract

A fabrication design of a conic surface ($k=-6.5$), in monocrystalline silicon substrate and based on anisotropic etching with KOH, is presented. The conical surface is approximated by means of spherical windows; comparisons between diameter and separation of the spherical windows, as well as the parameters that govern the selection are discussed.

Downloads

Published

2005-01-01

How to Cite

[1]
A. Rojas H., F. Renero C., W. Calleja A., R. Pérez R., O. Totolhua P., and F. Gracia T., “Diseño de una superficie cónica en silicio cristalino”, Rev. Mex. Fís., vol. 51, no. 6, pp. 620–0, Jan. 2005.

Issue

Vol. 51 No. 6 (2005): Revista Mexicana de Física.

Section

Articles

License

Authors retain copyright and grant the Revista Mexicana de Física right of first publication with the work simultaneously licensed under a CC BY-NC-ND 4.0 that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.