Diseño de una superficie cónica en silicio cristalino

Authors

  • A.G. Rojas H.
  • F. Renero C.
  • W. Calleja A.
  • R. Pérez R.
  • O. Totolhua P.
  • F. Gracia T.

Keywords:

Optoelectronic devices, micromachining in microelectronics, optical mirrors

Abstract

A fabrication design of a conic surface ($k=-6.5$), in monocrystalline silicon substrate and based on anisotropic etching with KOH, is presented. The conical surface is approximated by means of spherical windows; comparisons between diameter and separation of the spherical windows, as well as the parameters that govern the selection are discussed.

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Published

2005-01-01

Issue

Vol. 51 No. 6 (2005): Revista Mexicana de Física.

Section

Articles

License

Authors retain copyright and grant the Revista Mexicana de Física right of first publication with the work simultaneously licensed under a CC BY-NC-ND 4.0 that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.

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