A 540$\mu $T$^{ - 1}$ silicon-based MAGFET
Keywords:
Semiconductor devices, field effect devices, microelectronicsAbstract
This paper describes an MOS transistor-based transducer used for measuring magnetic fields. The setup, the electric/magnetic characterization, and an equivalent circuit for transistor level simulations are presented. The sensor (also called MAGFET), designed in a 1.5$\mu $m CMOS process, presents a relative magnetic sensitivity S$_{r}$=540$\mu $T$^{ - 1}$ at room temperature.Downloads
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Authors retain copyright and grant the Revista Mexicana de Física right of first publication with the work simultaneously licensed under a CC BY-NC-ND 4.0 that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.