Bimetallic Pd-Pt films prepared by MOCVD

Abstract

Bimetallic Pd-Pt films have been prepared on amorphous planar substrates by MOCVD using metal-acetylacetonate precursors. The effects of the MOCVD experimental conditions on the surface morphology, crystallite size and chemical composition of the bimetallic films have been analyzed. X-ray diffraction results show that bimetallic films consist of Pd-Pt solid solutions of variable composition depending on the initial metallic content in the inlet gases. Thus Pd-rich films can be obtained as preferred for the catalysts industry. The surface morphology of the bimetallic films varied from smooth to rough surfaces with the increase in total pressure. The crystallite size in the bimetallic films varies from 40 to 100 nm. Therefore, the MOCVD technique could be considered to be a viable alternative route for the preparation of bimetallic Pd-Pt films, which are in demand in the technology of supported bimetallic catalysts.