Efecto de la temperatura de substrato en las propiedades estructurales, ópticas y ferroeléctricas de películas delgadas de BaTiO$_{3}$ depositadas por RF sputtering

Abstract

Thin Films of Barium Titanate (BaTiO$_{3}$) were grown on nichrome and quartz substrates, using a BaTiO$_{3}$ target, by RF-sputtering technique. We varied the substrate temperature in order to study its effect on the structural, optical and ferroelectric properties of the samples. The results of the X-Ray diffraction showed tetragonal structure with increases of the cristallinity as increases the substrate temperature. Furthermore, it observed by ultraviolet-visible (UV-VIS) spectroscopy that the band gap decreased as the substrate temperature increases showing abrupt sharp decrease at 494.8$^{\circ}$C. The ferroelectric properties of the films showed a dependence with substrate temperature, the best ferroelectric answer was obtained at 494.8$^{\circ}$C.