Single shot phase shifting techniques for 4D radial slope measurements of transparent samples

Abstract

Through the use of non-destructive optical techniques to measure surfaces with high accuracy, a Mach-Zehnder Radial-Shear interferometer (MZRI) was implemented to analyze the radial slope of phase objects using simultaneous phase-shifting interferometry (SPSI). This optical configuration allows one to simultaneously obtain n-shearograms in order to retrieve the optical phase data map with higher accuracy. Phase reconstruction is performed using a well-known four step phase shifting algorithm. The experimental results for transparent samples are presented in this paper.