Solution-processed transparent dielectric based on spin-on glass for electronic devices
Keywords:
Solution-processed, dielectric, spin-on glassAbstract
In this work, the fabrication and characterization of MOS and MIM capacitors using a solution-processed dielectric based on spin-on glass (SOG) solution is presented. The SOG solution is diluted with deionized water (DI) in order to make easier the evaporation of the organic material presented in the SOG. The films are highly transparent in the visible range, which makes feasible they use in transparent electronics. The capacitance-voltage and current-voltage characteristics of the MOS and MIM capacitors demonstrate the application of the solution-processed SOG/DI film as dielectric for electronic devices.Downloads
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Authors retain copyright and grant the Revista Mexicana de Física right of first publication with the work simultaneously licensed under a CC BY-NC-ND 4.0 that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.